ISO 14644-5 PDF無料ダウンロード
Clean Room의 규격 정하는 ISO 14644-1 "Classification of Air Cleanliness"에서는 아래처럼 청정도의 class를 나눈다. C n = 10 N (0.1 / D) 2.08 (1) where C n = maximum permitted number of particles per cubic meter equal ISO 14644-5 (2004): Operations ISO 14644 series ISO 14644-4 (2001): Design, construction and start up 6 Main changes in ISO 14644-1 7 Main changes in ISO 14644-1 ISO 14644-1:2015 – New maximum concentration limits